-\documentclass[12pt]{article}
+
+\documentclass[10pt, conference, compsocconf]{IEEEtran}
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+\usepackage[utf8]{inputenc}
+%\usepackage[cyr]{aeguill}
%\usepackage{pstricks,pst-node,pst-text,pst-3d}
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+\usepackage[ruled,lined,linesnumbered]{algorithm2e}
+
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-%%%%%%%%%%%%%%%%%%%%%%%%%%%% my bib path.
+
+
+\begin{document}
+
+
+%% \author{\IEEEauthorblockN{Authors Name/s per 1st Affiliation (Author)}
+%% \IEEEauthorblockA{line 1 (of Affiliation): dept. name of organization\\
+%% line 2: name of organization, acronyms acceptable\\
+%% line 3: City, Country\\
+%% line 4: Email: name@xyz.com}
+%% \and
+%% \IEEEauthorblockN{Authors Name/s per 2nd Affiliation (Author)}
+%% \IEEEauthorblockA{line 1 (of Affiliation): dept. name of organization\\
+%% line 2: name of organization, acronyms acceptable\\
+%% line 3: City, Country\\
+%% line 4: Email: name@xyz.com}
+%% }
+
\title{Using FPGAs for high speed and real time cantilever deflection estimation}
+\author{\IEEEauthorblockN{Raphaël Couturier\IEEEauthorrefmark{1}, Stéphane Domas\IEEEauthorrefmark{1}, Gwenhaël Goavec-Merou\IEEEauthorrefmark{2} and Michel Lenczner\IEEEauthorrefmark{2}}
+\IEEEauthorblockA{\IEEEauthorrefmark{1}FEMTO-ST, DISC, University of Franche-Comte, Belfort, France\\
+\{raphael.couturier,stephane.domas\}@univ-fcomte.fr}
+\IEEEauthorblockA{\IEEEauthorrefmark{2}FEMTO-ST, Time-Frequency, University of Franche-Comte, Besançon, France\\
+\{michel.lenczner@utbm.fr,gwenhael.goavec@trabucayre.com}
+}
+
+
-\author{ Raphaël COUTURIER\\
-Laboratoire d'Informatique
-de l'Universit\'e de Franche-Comt\'e, \\
-BP 527, \\
-90016~Belfort CEDEX, France\\
- \and Stéphane Domas\\
-Laboratoire d'Informatique
-de l'Universit\'e de Franche-Comt\'e, \\
-BP 527, \\
-90016~Belfort CEDEX, France\\
- \and Gwenhaël Goavec\\
-??
-?? \\
-??, \\
-??\\}
-\begin{document}
\maketitle
\section{Introduction}
-%% blabla +
+Cantilevers are used inside atomic force microscope which provides high
+resolution images of surfaces. Several technics have been used to measure the
+displacement of cantilevers in litterature. For example, it is possible to
+determine accurately the deflection with optic
+interferometer~\cite{CantiOptic89}, pizeoresistor~\cite{CantiPiezzo01} or
+capacitive sensing~\cite{CantiCapacitive03}. In this paper our attention is
+focused on a method based on interferometry to measure cantilevers'
+displacements. In this method cantilevers are illiminated by an optic
+source. The interferometry produces fringes on each cantilevers which enables to
+compute the cantilever displacement. In order to analyze the fringes a high
+speed camera is used. Images need to be processed quickly and then a estimation
+method is required to determine the displacement of each cantilever.
+In~\cite{AFMCSEM11} {\bf verifier ref}, the authors have used an algorithm based
+on spline to estimate the cantilevers' positions. The overall process gives
+accurate results but all the computation are performed on a standard computer
+using labview. Consequently, the main drawback of this implementation is that
+the computer is a bootleneck in the overall process. In this paper we propose to
+use a method based on least square and to implement all the computation on a
+FGPA.
+
+The remainder of the paper is organized as follows. Section~\ref{sec:measure}
+describes more precisely the measurement process. Our solution based on the
+least square method and the implementation on FPGA is presented in
+Section~\ref{sec:solus}. Experimentations are described in
+Section~\ref{sec:results}. Finally a conclusion and some perspectives are
+presented.
+
+
+
%% quelques ref commentées sur les calculs basés sur l'interférométrie
-\section{Measurement architecture}
-\label{sec:measure-archi}
+\section{Measurement principles}
+\label{sec:measure}
+\subsection{Architecture}
+\label{sec:archi}
%% description de l'architecture générale de l'acquisition d'images
%% avec au milieu une unité de traitement dont on ne précise pas ce
%% qu'elle est.
%% image tirée des expériences.
-\section{Design goals}
-\label{sec:goals}
-
-%% objectifs en terme de rapidité et de précision, avec en vue l'ajout
-%% du contrôle => l'unité de traitement qui s'impose est un FPGA =>
-%% algo adapté au FPGA.
-
-%% peut etre que cette section peut être déplacée en intro ... à voir.
-
-\section{Proposed solution}
-\label{sec:solus}
-
\subsection{Cantilever deflection estimation}
+\label{sec:deflest}
-%% => faire de l'interpolation de signal sinusoidal
-%% descriptif rapide des deux méthodes : splines et moindres carrés
As shown on image \ref{img:img-xp}, each cantilever is covered by
interferometric fringes. The fringes will distort when cantilevers are
deflected. Estimating the deflection is done by computing this
The global method consists in two main sequences. The first one aims
to determin the frequency $f$ of each profile with an algorithm based
-on spline interpolation (see below). It also computes the coefficient
-used for unwrapping the phase. The second one is the acquisition loop,
-while which images are taken at regular time steps. For each image,
-the phase $\theta$ of all profiles is computed to obtain, after
-unwrapping, the deflection of cantilevers.
-
-This phase computation is obviously the bottle-neck of the whole
-process. For example, if we consider the camera actually in use, an
-exposition time of 2.5ms for $1024\times 1204$ pixels seems the
-minimum that can be reached. For a $10\times 10$ cantilever array, if
-we neglect the time to extract pixels, it implies that computing the
-deflection of a single cantilever should take less than 25$µ$s, which is
-quite small.
+on spline interpolation (see section \ref{algo-spline}). It also
+computes the coefficient used for unwrapping the phase. The second one
+is the acquisition loop, while which images are taken at regular time
+steps. For each image, the phase $\theta$ of all profiles is computed
+to obtain, after unwrapping, the deflection of cantilevers.
+
+\subsection{Design goals}
+\label{sec:goals}
+
+If we put aside some hardware issues like the speed of the link
+between the camera and the computation unit, the time to deserialize
+pixels and to store them in memory, ... the phase computation is
+obviously the bottle-neck of the whole process. For example, if we
+consider the camera actually in use, an exposition time of 2.5ms for
+$1024\times 1204$ pixels seems the minimum that can be reached. For a
+$10\times 10$ cantilever array, if we neglect the time to extract
+pixels, it implies that computing the deflection of a single
+cantilever should take less than 25$\mu$s, thus 12.5$\mu$s by phase.\\
+
+In fact, this timing is a very hard constraint. Let consider a very
+small programm that initializes twenty million of doubles in memory
+and then does 1000000 cumulated sums on 20 contiguous values
+(experimental profiles have about this size). On an intel Core 2 Duo
+E6650 at 2.33GHz, this program reaches an average of 155Mflops. It
+implies that the phase computation algorithm should not take more than
+$240\times 12.5 = 1937$ floating operations. For integers, it gives
+$3000$ operations.
+
+%% to be continued ...
+
+%% � faire : timing de l'algo spline en C avec atan et tout le bordel.
+
+
+
+
+\section{Proposed solution}
+\label{sec:solus}
+
+
+\subsection{FPGA constraints}
+
+%% contraintes imposées par le FPGA : algo pipeline/parallele, pas d'op math complexe, ...
+
\subsection{Considered algorithms}
known.
\subsubsection{Spline algorithm}
-
+\label{sec:algo-spline}
Let consider a profile $P$, that is a segment of $M$ pixels with an
intensity in gray levels. Let call $I(x)$ the intensity of profile in $x
\in [0,M[$.
\ldots,M-1$. A normalisation allows to scale known intensities into
$[-1,1]$. We compute splines that fit at best these normalised
intensities. Splines are used to interpolate $N = k\times M$ points
-(typically $k=3$ is sufficient), within $[0,M[$. Let call $x^s$ the
+(typically $k=4$ is sufficient), within $[0,M[$. Let call $x^s$ the
coordinates of these $N$ points and $I^s$ their intensities.
In order to have the frequency, the mean line $a.x+b$ (see equation \ref{equ:profile}) of $I^s$ is
\theta = atan \left[ \frac{\sum_{i=0}^{N-1} sin(2\pi f x^s_i) \times I^s(x^s_i)}{\sum_{i=0}^{N-1} cos(2\pi f x^s_i) \times I^s(x^s_i)} \right]
\end{equation}
-Two things can be noticed. Firstly, the frequency could also be
-obtained using the derivates of spline equations, which only implies
-to solve quadratic equations. Secondly, frequency of each profile is
-computed a single time, before the acquisition loop. Thus, $sin(2\pi f
-x^s_i)$ and $cos(2\pi f x^s_i)$ could also be computed before the loop, which leads to a
-much faster computation of $\theta$.
+Two things can be noticed :
+\begin{itemize}
+\item the frequency could also be obtained using the derivates of
+ spline equations, which only implies to solve quadratic equations.
+\item frequency of each profile is computed a single time, before the
+ acquisition loop. Thus, $sin(2\pi f x^s_i)$ and $cos(2\pi f x^s_i)$
+ could also be computed before the loop, which leads to a much faster
+ computation of $\theta$.
+\end{itemize}
\subsubsection{Least square algorithm}
computed.
\item The simplest method to find the good $\theta$ is to discretize
- $[-\pi,\pi]$ in $N$ steps, and to search which step leads to the
+ $[-\pi,\pi]$ in $nb_s$ steps, and to search which step leads to the
result closest to zero. By the way, three other lookup tables can
also be computed before the loop :
-\[ sin \theta, cos \theta, \left[ cos 2\theta \sum_{i=0}^{M-1} sin(4\pi f.i) + sin 2\theta \sum_{i=0}^{M-1} cos(4\pi f.i)\right] \]
+\[ sin \theta, cos \theta, \]
-\item This search can be very fast using a dichotomous process in $log_2(N)$
+\[ \left[ cos 2\theta \sum_{i=0}^{M-1} sin(4\pi f.i) + sin 2\theta \sum_{i=0}^{M-1} cos(4\pi f.i)\right] \]
-\end{itemize}
+\item This search can be very fast using a dichotomous process in $log_2(nb_s)$
-\subsubsection{Comparison}
-
-\subsection{FPGA constraints}
-
-%% contraintes imposées par le FPGA : algo pipeline/parallele, pas d'op math complexe, ...
+\end{itemize}
-\subsection{Least square algorithm}
+Finally, the whole summarizes in an algorithm (called LSQ in the following) in two parts, one before and one during the acquisition loop :
+\begin{algorithm}[h]
+\caption{LSQ algorithm - before acquisition loop.}
+\label{alg:lsq-before}
+
+ $M \leftarrow $ number of pixels of the profile\\
+ I[] $\leftarrow $ intensities of pixels\\
+ $f \leftarrow $ frequency of the profile\\
+ $s4i \leftarrow \sum_{i=0}^{M-1} sin(4\pi f.i)$\\
+ $c4i \leftarrow \sum_{i=0}^{M-1} cos(4\pi f.i)$\\
+ $nb_s \leftarrow $ number of discretization steps of $[-\pi,\pi]$\\
+
+ \For{$i=0$ to $nb_s $}{
+ $\theta \leftarrow -\pi + 2\pi\times \frac{i}{nb_s}$\\
+ lut$_s$[$i$] $\leftarrow sin \theta$\\
+ lut$_c$[$i$] $\leftarrow cos \theta$\\
+ lut$_A$[$i$] $\leftarrow cos 2 \theta \times s4i + sin 2 \theta \times c4i$\\
+ lut$_{sfi}$[$i$] $\leftarrow sin (2\pi f.i)$\\
+ lut$_{cfi}$[$i$] $\leftarrow cos (2\pi f.i)$\\
+ }
+\end{algorithm}
+
+\begin{algorithm}[ht]
+\caption{LSQ algorithm - during acquisition loop.}
+\label{alg:lsq-during}
+
+ $\bar{x} \leftarrow \frac{M-1}{2}$\\
+ $\bar{y} \leftarrow 0$, $x_{var} \leftarrow 0$, $xy_{covar} \leftarrow 0$\\
+ \For{$i=0$ to $M-1$}{
+ $\bar{y} \leftarrow \bar{y} + $ I[$i$]\\
+ $x_{var} \leftarrow x_{var} + (i-\bar{x})^2$\\
+ }
+ $\bar{y} \leftarrow \frac{\bar{y}}{M}$\\
+ \For{$i=0$ to $M-1$}{
+ $xy_{covar} \leftarrow xy_{covar} + (i-\bar{x}) \times (I[i]-\bar{y})$\\
+ }
+ $slope \leftarrow \frac{xy_{covar}}{x_{var}}$\\
+ $start \leftarrow y_{moy} - slope\times \bar{x}$\\
+ \For{$i=0$ to $M-1$}{
+ $I[i] \leftarrow I[i] - start - slope\times i$\\
+ }
+
+ $I_{max} \leftarrow max_i(I[i])$, $I_{min} \leftarrow min_i(I[i])$\\
+ $amp \leftarrow \frac{I_{max}-I_{min}}{2}$\\
+
+ $Is \leftarrow 0$, $Ic \leftarrow 0$\\
+ \For{$i=0$ to $M-1$}{
+ $Is \leftarrow Is + I[i]\times $ lut$_{sfi}$[$i$]\\
+ $Ic \leftarrow Ic + I[i]\times $ lut$_{cfi}$[$i$]\\
+ }
+
+ $\delta \leftarrow \frac{nb_s}{2}$, $b_l \leftarrow 0$, $b_r \leftarrow \delta$\\
+ $v_l \leftarrow -2.I_s - amp.$lut$_A$[$b_l$]\\
+
+ \While{$\delta >= 1$}{
+
+ $v_r \leftarrow 2.[ Is.$lut$_c$[$b_r$]$ + Ic.$lut$_s$[$b_r$]$ ] - amp.$lut$_A$[$b_r$]\\
+
+ \If{$!(v_l < 0$ and $v_r >= 0)$}{
+ $v_l \leftarrow v_r$ \\
+ $b_l \leftarrow b_r$ \\
+ }
+ $\delta \leftarrow \frac{\delta}{2}$\\
+ $b_r \leftarrow b_l + \delta$\\
+ }
+ \uIf{$!(v_l < 0$ and $v_r >= 0)$}{
+ $v_l \leftarrow v_r$ \\
+ $b_l \leftarrow b_r$ \\
+ $b_r \leftarrow b_l + 1$\\
+ $v_r \leftarrow 2.[ Is.$lut$_c$[$b_r$]$ + Ic.$lut$_s$[$b_r$]$ ] - amp.$lut$_A$[$b_r$]\\
+ }
+ \Else {
+ $b_r \leftarrow b_l + 1$\\
+ }
+
+ \uIf{$ abs(v_l) < v_r$}{
+ $b_{\theta} \leftarrow b_l$ \\
+ }
+ \Else {
+ $b_{\theta} \leftarrow b_r$ \\
+ }
+ $\theta \leftarrow \pi\times \left[\frac{2.b_{ref}}{nb_s}-1\right]$\\
+
+\end{algorithm}
-%% description précise
-%% avantage sur FPGA
+\subsubsection{Comparison}
-\subsection{VDHL design paradigms}
+We compared the two algorithms on the base of three criterions :
+\begin{itemize}
+\item precision of results on a cosinus profile, distorted with noise,
+\item number of operations,
+\item complexity to implement an FPGA version.
+\end{itemize}
-\subsection{VDHL implementation}
+For the first item, we produced a matlab version of each algorithm,
+running with double precision values. The profile was generated for
+about 34000 different values of period ($\in [3.1, 6.1]$, step = 0.1),
+phase ($\in [-3.1 , 3.1]$, step = 0.062) and slope ($\in [-2 , 2]$,
+step = 0.4). For LSQ, $nb_s = 1024$, which leads to a maximal error of
+$\frac{\pi}{1024}$ on phase computation. Current A. Meister and
+M. Favre experiments show a ratio of 50 between variation of phase and
+the deflection of a lever. Thus, the maximal error due to
+discretization correspond to an error of 0.15nm on the lever
+deflection, which is smaller than the best precision they achieved,
+i.e. 0.3nm.
+
+For each test, we add some noise to the profile : each group of two
+pixels has its intensity added to a random number picked in $[-N,N]$
+(NB: it should be noticed that picking a new value for each pixel does
+not distort enough the profile). The absolute error on the result is
+evaluated by comparing the difference between the reference and
+computed phase, out of $2\pi$, expressed in percents. That is : $err =
+100\times \frac{|\theta_{ref} - \theta_{comp}|}{2\pi}$.
+
+Table \ref{tab:algo_prec} gives the maximum and average error for the two algorithms and increasing values of $N$.
+
+\begin{table}[ht]
+ \begin{center}
+ \begin{tabular}{|c|c|c|c|c|}
+ \hline
+ & \multicolumn{2}{c|}{SPL} & \multicolumn{2}{c|}{LSQ} \\ \cline{2-5}
+ noise & max. err. & aver. err. & max. err. & aver. err. \\ \hline
+ 0 & 2.46 & 0.58 & 0.49 & 0.1 \\ \hline
+ 2.5 & 2.75 & 0.62 & 1.16 & 0.22 \\ \hline
+ 5 & 3.77 & 0.72 & 2.47 & 0.41 \\ \hline
+ 7.5 & 4.72 & 0.86 & 3.33 & 0.62 \\ \hline
+ 10 & 5.62 & 1.03 & 4.29 & 0.81 \\ \hline
+ 15 & 7.96 & 1.38 & 6.35 & 1.21 \\ \hline
+ 30 & 17.06 & 2.6 & 13.94 & 2.45 \\ \hline
+
+\end{tabular}
+\caption{Error (in \%) for cosinus profiles, with noise.}
+\label{tab:algo_prec}
+\end{center}
+\end{table}
+
+These results show that the two algorithms are very close, with a
+slight advantage for LSQ. Furthemore, both behave very well against
+noise. Assuming the experimental ratio of 50 (see above), an error of
+1 percent on phase correspond to an error of 0.5nm on the lever
+deflection, which is very close to the best precision.
+
+Obviously, it is very hard to predict which level of noise will be
+present in real experiments and how it will distort the
+profiles. Nevertheless, we can see on figure \ref{fig:noise20} the
+profile with $N=10$ that leads to the biggest error. It is a bit
+distorted, with pikes and straight/rounded portions, and relatively
+close to most of that come from experiments. Figure \ref{fig:noise60}
+shows a sample of worst profile for $N=30$. It is completly distorted,
+largely beyond the worst experimental ones.
+
+\begin{figure}[ht]
+\begin{center}
+ \includegraphics[width=9cm]{intens-noise20-spl}
+\end{center}
+\caption{Sample of worst profile for N=10}
+\label{fig:noise20}
+\end{figure}
+
+\begin{figure}[ht]
+\begin{center}
+ \includegraphics[width=9cm]{intens-noise60-lsq}
+\end{center}
+\caption{Sample of worst profile for N=30}
+\label{fig:noise60}
+\end{figure}
+
+The second criterion is relatively easy to estimate for LSQ and harder
+for SPL because of $atan$ operation. In both cases, it is proportional
+to numbers of pixels $M$. For LSQ, it also depends on $nb_s$ and for
+SPL on $N = k\times M$, i.e. the number of interpolated points.
+
+We assume that $M=20$, $nb_s=1024$, $k=4$, all possible parts are
+already in lookup tables and only arithmetic operations (+, -, *, /)
+are taken account. Translating the two algorithms in C code, we obtain
+about 400 operations for LSQ and 1340 (plus the unknown for $atan$)
+for SPL. Even if the result is largely in favor of LSQ, we can notice
+that executing the C code (compiled with \tt{-O3}) of SPL on an
+2.33GHz Core 2 Duo only takes 6.5µs in average, which is under our
+desing goals. The final decision is thus driven by the third criterion.\\
+
+The Spartan 6 used in our architecture has hard constraint : it has no
+floating point units. Thus, all computations have to be done with
+integers.
+
+
+
+\subsection{VHDL design paradigms}
+
+\subsection{VHDL implementation}
\section{Experimental results}
\label{sec:results}
