Cantilevers are used inside atomic force microscope which provides high
resolution images of surfaces. Several technics have been used to measure the
displacement of cantilevers in litterature. For example, it is possible to
-determine accurately the deflection with optic interferometer~\cite{CantiOptic89},
-pizeoresistor~\cite{CantiPiezzo01} or capacitive
-sensing~\cite{CantiCapacitive03}.
-%% blabla +
+determine accurately the deflection with different mechanisms.
+In~\cite{CantiPiezzo01}, authors used piezoresistor integrated into the
+cantilever. Nevertheless this approach suffers from the complexity of the
+microfabrication process needed to implement the sensor in the cantilever.
+In~\cite{CantiCapacitive03}, authors have presented an cantilever mechanism
+based on capacitive sensing. This kind of technic also involves to instrument
+the cantiliver which result in a complex fabrication process.
+
+In this paper our attention is focused on a method based on interferometry to
+measure cantilevers' displacements. In this method cantilevers are illuminated
+by an optic source. The interferometry produces fringes on each cantilevers
+which enables to compute the cantilever displacement. In order to analyze the
+fringes a high speed camera is used. Images need to be processed quickly and
+then a estimation method is required to determine the displacement of each
+cantilever. In~\cite{AFMCSEM11}, the authors have used an algorithm based on
+spline to estimate the cantilevers' positions.
+%%RAPH : ce qui est génant c'est qu'ils ne parlent pas de spline dans ce papier...
+ The overall process gives
+accurate results but all the computation are performed on a standard computer
+using labview. Consequently, the main drawback of this implementation is that
+the computer is a bootleneck in the overall process. In this paper we propose to
+use a method based on least square and to implement all the computation on a
+FGPA.
+
+The remainder of the paper is organized as follows. Section~\ref{sec:measure}
+describes more precisely the measurement process. Our solution based on the
+least square method and the implementation on FPGA is presented in
+Section~\ref{sec:solus}. Experimentations are described in
+Section~\ref{sec:results}. Finally a conclusion and some perspectives are
+presented.
+
+
+
%% quelques ref commentées sur les calculs basés sur l'interférométrie
\section{Measurement principles}
\label{sec:measure}
+In order to develop simple, cost effective and user-friendly probe arrays,
+authors of ~\cite{AFMCSEM11} have developped a system based of interferometry.
+
+
\subsection{Architecture}
\label{sec:archi}
%% description de l'architecture générale de l'acquisition d'images
\subsubsection{Comparison}
-\subsection{VDHL design paradigms}
+\subsection{VHDL design paradigms}
-\subsection{VDHL implementation}
+\subsection{VHDL implementation}
\section{Experimental results}
\label{sec:results}
