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[dmems12.git] / dmems12.tex

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 \section{Introduction}
 
 
 \section{Introduction}
 

+Cantilevers  are  used  inside  atomic  force  microscope  which  provides  high
+resolution images of  surfaces.  Several technics have been  used to measure the
+displacement  of cantilevers  in litterature.   For example,  it is  possible to
+determine  accurately   the  deflection  with   optic  interferometer~\cite{CantiOptic89},
+pizeoresistor~\cite{CantiPiezzo01}                 or                 capacitive
+sensing~\cite{CantiCapacitive03}.

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 %% quelques ref commentées sur les calculs basés sur l'interférométrie
 
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 %% quelques ref commentées sur les calculs basés sur l'interférométrie