-Linnick interferomter~\cite{Sinclair:05}. A laser beam is first split (by the
-splitter) into a reference beam and a sample beam that reachs the cantilever
-array. In order to be able to move the cantilever array, it is mounted on a
-translation and rotational stage with five degrees of freedom. The optical
-system is also fixed to the stage. Thus, the cantilever array is centered in the
-optical system which can be adjusted accurately. The beam illuminates the array
-by a microscope objective and the light reflects on the cantilevers. Likewise
-the reference beam reflects on a movable mirror. A CMOS camera chip records the
+Linnick interferomter~\cite{Sinclair:05}. It is illustrated in
+Figure~\ref{fig:AFM}. A laser diode is first split (by the splitter) into a
+reference beam and a sample beam that reachs the cantilever array. In order to
+be able to move the cantilever array, it is mounted on a translation and
+rotational hexapod stage with five degrees of freedom. The optical system is
+also fixed to the stage. Thus, the cantilever array is centered in the optical
+system which can be adjusted accurately. The beam illuminates the array by a
+microscope objective and the light reflects on the cantilevers. Likewise the
+reference beam reflects on a movable mirror. A CMOS camera chip records the