X-Git-Url: https://bilbo.iut-bm.univ-fcomte.fr/and/gitweb/dmems12.git/blobdiff_plain/0d52df2ec65d3122bfbecc24b94647275b7ae89f..4d2d346e47215fbef2ad2e0e1b4c3b33bb2923fa:/dmems12.tex

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 \section{Measurement principles}
 \label{sec:measure}
 
-In  order to  develop simple,  cost  effective and  user-friendly probe  arrays,
-authors of ~\cite{AFMCSEM11} have developped a system based of interferometry.
+In order to develop simple,  cost effective and user-friendly cantilever arrays,
+authors   of    ~\cite{AFMCSEM11}   have   developped   a    system   based   of
+interferometry. In opposition to other optical based systems, using a laser beam
+deflection scheme and  sentitive to the angular displacement  of the cantilever,
+interferometry  is sensitive  to  the  optical path  difference  induced by  the
+vertical displacement of the cantilever.
+%%RAPH : est ce qu'on pique une image? génant ou non?
+The system build  by authors of~\cite{AFMCSEM11} has been  developped based on a
+Linnick interferomter~\cite{Sinclair:05}.   A laser beam is first  split (by the
+splitter) into  a reference beam  and a sample  beam that reachs  the cantilever
+array.  In  order to be able  to move the cantilever  array, it is  mounted on a
+translation  and rotational  stage with  five  degrees of  freedom. The  optical
+system is also fixed to the stage. Thus, the cantilever array is centered in the
+optical system which can be adjusted accurately.  The beam illuminates the array
+by a  microscope objective and the  light reflects on  the cantilevers. Likewise
+the reference beam reflects on a movable mirror.  A CMOS camera chip records the
+reference and  sample beams which  are recombined in  the beam splitter  and the
+interferogram. At the beginning of each experiment, the movable mirror is fitted
+manually in order to align the interferometric fringes approximately parallel to
+the  cantilevers. When  cantilevers  move due  to  the surface,  the bending  of
+cantilevers produce movements in the fringes  that can be detected with the CMOS
+camera.  Finally  the fringes  need  to  be  analyzed. In~\cite{AFMCSEM11},  the
+authors used  a LabView program to  compute the cantilevers'  movements from the
+fringes.
+
+
+
+
+
 
 
 \subsection{Architecture}