X-Git-Url: https://bilbo.iut-bm.univ-fcomte.fr/and/gitweb/dmems12.git/blobdiff_plain/0d52df2ec65d3122bfbecc24b94647275b7ae89f..4d2d346e47215fbef2ad2e0e1b4c3b33bb2923fa:/dmems12.tex?ds=sidebyside diff --git a/dmems12.tex b/dmems12.tex index 5920a5b..ed1709b 100644 --- a/dmems12.tex +++ b/dmems12.tex @@ -112,8 +112,35 @@ presented. \section{Measurement principles} \label{sec:measure} -In order to develop simple, cost effective and user-friendly probe arrays, -authors of ~\cite{AFMCSEM11} have developped a system based of interferometry. +In order to develop simple, cost effective and user-friendly cantilever arrays, +authors of ~\cite{AFMCSEM11} have developped a system based of +interferometry. In opposition to other optical based systems, using a laser beam +deflection scheme and sentitive to the angular displacement of the cantilever, +interferometry is sensitive to the optical path difference induced by the +vertical displacement of the cantilever. +%%RAPH : est ce qu'on pique une image? génant ou non? +The system build by authors of~\cite{AFMCSEM11} has been developped based on a +Linnick interferomter~\cite{Sinclair:05}. A laser beam is first split (by the +splitter) into a reference beam and a sample beam that reachs the cantilever +array. In order to be able to move the cantilever array, it is mounted on a +translation and rotational stage with five degrees of freedom. The optical +system is also fixed to the stage. Thus, the cantilever array is centered in the +optical system which can be adjusted accurately. The beam illuminates the array +by a microscope objective and the light reflects on the cantilevers. Likewise +the reference beam reflects on a movable mirror. A CMOS camera chip records the +reference and sample beams which are recombined in the beam splitter and the +interferogram. At the beginning of each experiment, the movable mirror is fitted +manually in order to align the interferometric fringes approximately parallel to +the cantilevers. When cantilevers move due to the surface, the bending of +cantilevers produce movements in the fringes that can be detected with the CMOS +camera. Finally the fringes need to be analyzed. In~\cite{AFMCSEM11}, the +authors used a LabView program to compute the cantilevers' movements from the +fringes. + + + + + \subsection{Architecture}