X-Git-Url: https://bilbo.iut-bm.univ-fcomte.fr/and/gitweb/dmems12.git/blobdiff_plain/5bd43a57b7e5c885d77aac6dceea8cc19f2cfaea..0d52df2ec65d3122bfbecc24b94647275b7ae89f:/dmems12.tex?ds=sidebyside diff --git a/dmems12.tex b/dmems12.tex index 423b0f7..5920a5b 100644 --- a/dmems12.tex +++ b/dmems12.tex @@ -71,12 +71,51 @@ \section{Introduction} -%% blabla + +Cantilevers are used inside atomic force microscope which provides high +resolution images of surfaces. Several technics have been used to measure the +displacement of cantilevers in litterature. For example, it is possible to +determine accurately the deflection with different mechanisms. +In~\cite{CantiPiezzo01}, authors used piezoresistor integrated into the +cantilever. Nevertheless this approach suffers from the complexity of the +microfabrication process needed to implement the sensor in the cantilever. +In~\cite{CantiCapacitive03}, authors have presented an cantilever mechanism +based on capacitive sensing. This kind of technic also involves to instrument +the cantiliver which result in a complex fabrication process. + +In this paper our attention is focused on a method based on interferometry to +measure cantilevers' displacements. In this method cantilevers are illuminated +by an optic source. The interferometry produces fringes on each cantilevers +which enables to compute the cantilever displacement. In order to analyze the +fringes a high speed camera is used. Images need to be processed quickly and +then a estimation method is required to determine the displacement of each +cantilever. In~\cite{AFMCSEM11}, the authors have used an algorithm based on +spline to estimate the cantilevers' positions. +%%RAPH : ce qui est génant c'est qu'ils ne parlent pas de spline dans ce papier... + The overall process gives +accurate results but all the computation are performed on a standard computer +using labview. Consequently, the main drawback of this implementation is that +the computer is a bootleneck in the overall process. In this paper we propose to +use a method based on least square and to implement all the computation on a +FGPA. + +The remainder of the paper is organized as follows. Section~\ref{sec:measure} +describes more precisely the measurement process. Our solution based on the +least square method and the implementation on FPGA is presented in +Section~\ref{sec:solus}. Experimentations are described in +Section~\ref{sec:results}. Finally a conclusion and some perspectives are +presented. + + + %% quelques ref commentées sur les calculs basés sur l'interférométrie \section{Measurement principles} \label{sec:measure} +In order to develop simple, cost effective and user-friendly probe arrays, +authors of ~\cite{AFMCSEM11} have developped a system based of interferometry. + + \subsection{Architecture} \label{sec:archi} %% description de l'architecture générale de l'acquisition d'images @@ -328,9 +367,9 @@ Finally, the whole summarizes in an algorithm (called LSQ in the following) in t \subsubsection{Comparison} -\subsection{VDHL design paradigms} +\subsection{VHDL design paradigms} -\subsection{VDHL implementation} +\subsection{VHDL implementation} \section{Experimental results} \label{sec:results}