+The system build by authors of~\cite{AFMCSEM11} has been developped based on a
+Linnick interferomter~\cite{Sinclair:05}. It is illustrated in Figure~\ref{fig:AFM}. A
+laser beam is first split (by the splitter) into a reference beam and a sample
+beam that reachs the cantilever array. In order to be able to move the
+cantilever array, it is mounted on a translation and rotational stage with five
+degrees of freedom. The optical system is also fixed to the stage. Thus, the
+cantilever array is centered in the optical system which can be adjusted
+accurately. The beam illuminates the array by a microscope objective and the
+light reflects on the cantilevers. Likewise the reference beam reflects on a
+movable mirror. A CMOS camera chip records the reference and sample beams which
+are recombined in the beam splitter and the interferogram. At the beginning of
+each experiment, the movable mirror is fitted manually in order to align the
+interferometric fringes approximately parallel to the cantilevers. When
+cantilevers move due to the surface, the bending of cantilevers produce
+movements in the fringes that can be detected with the CMOS camera. Finally the
+fringes need to be analyzed. In~\cite{AFMCSEM11}, the authors used a LabView
+program to compute the cantilevers' movements from the fringes.
+
+\begin{figure}
+\begin{center}
+\includegraphics[width=\columnwidth]{AFM}
+\end{center}
+\caption{schema of the AFM}
+\label{fig:AFM}
+\end{figure}