From: couturie Date: Mon, 17 Oct 2011 19:54:32 +0000 (+0200) Subject: retouche intro X-Git-Url: https://bilbo.iut-bm.univ-fcomte.fr/and/gitweb/dmems12.git/commitdiff_plain/0d52df2ec65d3122bfbecc24b94647275b7ae89f?ds=inline retouche intro --- diff --git a/dmems12.tex b/dmems12.tex index 6a7f646..5920a5b 100644 --- a/dmems12.tex +++ b/dmems12.tex @@ -74,17 +74,24 @@ Cantilevers are used inside atomic force microscope which provides high resolution images of surfaces. Several technics have been used to measure the displacement of cantilevers in litterature. For example, it is possible to -determine accurately the deflection with optic -interferometer~\cite{CantiOptic89}, pizeoresistor~\cite{CantiPiezzo01} or -capacitive sensing~\cite{CantiCapacitive03}. In this paper our attention is -focused on a method based on interferometry to measure cantilevers' -displacements. In this method cantilevers are illiminated by an optic -source. The interferometry produces fringes on each cantilevers which enables to -compute the cantilever displacement. In order to analyze the fringes a high -speed camera is used. Images need to be processed quickly and then a estimation -method is required to determine the displacement of each cantilever. -In~\cite{AFMCSEM11} {\bf verifier ref}, the authors have used an algorithm based -on spline to estimate the cantilevers' positions. The overall process gives +determine accurately the deflection with different mechanisms. +In~\cite{CantiPiezzo01}, authors used piezoresistor integrated into the +cantilever. Nevertheless this approach suffers from the complexity of the +microfabrication process needed to implement the sensor in the cantilever. +In~\cite{CantiCapacitive03}, authors have presented an cantilever mechanism +based on capacitive sensing. This kind of technic also involves to instrument +the cantiliver which result in a complex fabrication process. + +In this paper our attention is focused on a method based on interferometry to +measure cantilevers' displacements. In this method cantilevers are illuminated +by an optic source. The interferometry produces fringes on each cantilevers +which enables to compute the cantilever displacement. In order to analyze the +fringes a high speed camera is used. Images need to be processed quickly and +then a estimation method is required to determine the displacement of each +cantilever. In~\cite{AFMCSEM11}, the authors have used an algorithm based on +spline to estimate the cantilevers' positions. +%%RAPH : ce qui est génant c'est qu'ils ne parlent pas de spline dans ce papier... + The overall process gives accurate results but all the computation are performed on a standard computer using labview. Consequently, the main drawback of this implementation is that the computer is a bootleneck in the overall process. In this paper we propose to @@ -105,6 +112,10 @@ presented. \section{Measurement principles} \label{sec:measure} +In order to develop simple, cost effective and user-friendly probe arrays, +authors of ~\cite{AFMCSEM11} have developped a system based of interferometry. + + \subsection{Architecture} \label{sec:archi} %% description de l'architecture générale de l'acquisition d'images