From: Raphael Couturier <raphael.couturier@univ-fcomte.fr>
Date: Tue, 18 Oct 2011 08:40:37 +0000 (+0200)
Subject: légère modif
X-Git-Url: https://bilbo.iut-bm.univ-fcomte.fr/and/gitweb/dmems12.git/commitdiff_plain/77fc759e3cccd43e2d9f6ee355069a0e80e5221f?hp=--cc

légère modif
---

77fc759e3cccd43e2d9f6ee355069a0e80e5221f
diff --git a/dmems12.tex b/dmems12.tex
index 4aea93c..d8d592d 100644
--- a/dmems12.tex
+++ b/dmems12.tex
@@ -133,22 +133,23 @@ interferometry  is sensitive  to  the  optical path  difference  induced by  the
 vertical displacement of the cantilever.
 
 The system build  by authors of~\cite{AFMCSEM11} has been  developped based on a
-Linnick interferomter~\cite{Sinclair:05}. It is illustrated in Figure~\ref{fig:AFM}.  A
-laser beam is first  split (by the splitter) into a reference  beam and a sample
-beam  that reachs  the  cantilever  array.  In  order  to be  able  to move  the
-cantilever array, it is mounted on  a translation and rotational stage with five
-degrees of  freedom. The optical  system is also  fixed to the stage.  Thus, the
-cantilever  array  is centered  in  the optical  system  which  can be  adjusted
-accurately.  The  beam illuminates the array  by a microscope  objective and the
-light reflects  on the  cantilevers. Likewise the  reference beam reflects  on a
-movable mirror.  A CMOS camera chip records the reference and sample beams which
-are recombined in  the beam splitter and the interferogram.  At the beginning of
-each experiment,  the movable mirror  is fitted manually  in order to  align the
-interferometric  fringes   approximately  parallel  to   the  cantilevers.  When
-cantilevers  move  due  to  the  surface, the  bending  of  cantilevers  produce
-movements in the fringes that can be detected with the CMOS camera.  Finally the
-fringes need  to be  analyzed. In~\cite{AFMCSEM11}, the  authors used  a LabView
-program to compute the cantilevers' movements from the fringes.
+Linnick     interferomter~\cite{Sinclair:05}.    It     is     illustrated    in
+Figure~\ref{fig:AFM}.  A  laser diode  is first split  (by the splitter)  into a
+reference beam and a sample beam  that reachs the cantilever array.  In order to
+be  able to  move  the cantilever  array, it  is  mounted on  a translation  and
+rotational hexapod  stage with  five degrees of  freedom. The optical  system is
+also fixed to the stage.  Thus,  the cantilever array is centered in the optical
+system which  can be adjusted accurately.   The beam illuminates the  array by a
+microscope objective  and the  light reflects on  the cantilevers.  Likewise the
+reference beam  reflects on a  movable mirror.  A  CMOS camera chip  records the
+reference and  sample beams which  are recombined in  the beam splitter  and the
+interferogram.   At the  beginning of  each  experiment, the  movable mirror  is
+fitted  manually in  order to  align the  interferometric  fringes approximately
+parallel  to the cantilevers.   When cantilevers  move due  to the  surface, the
+bending of  cantilevers produce  movements in the  fringes that can  be detected
+with    the    CMOS    camera.     Finally    the    fringes    need    to    be
+analyzed. In~\cite{AFMCSEM11}, the authors used a LabView program to compute the
+cantilevers' movements from the fringes.
 
 \begin{figure}    
 \begin{center}