From 77fc759e3cccd43e2d9f6ee355069a0e80e5221f Mon Sep 17 00:00:00 2001 From: Raphael Couturier Date: Tue, 18 Oct 2011 10:40:37 +0200 Subject: [PATCH 1/1] =?utf8?q?l=C3=A9g=C3=A8re=20modif?= MIME-Version: 1.0 Content-Type: text/plain; charset=utf8 Content-Transfer-Encoding: 8bit --- dmems12.tex | 33 +++++++++++++++++---------------- 1 file changed, 17 insertions(+), 16 deletions(-) diff --git a/dmems12.tex b/dmems12.tex index 4aea93c..d8d592d 100644 --- a/dmems12.tex +++ b/dmems12.tex @@ -133,22 +133,23 @@ interferometry is sensitive to the optical path difference induced by the vertical displacement of the cantilever. The system build by authors of~\cite{AFMCSEM11} has been developped based on a -Linnick interferomter~\cite{Sinclair:05}. It is illustrated in Figure~\ref{fig:AFM}. A -laser beam is first split (by the splitter) into a reference beam and a sample -beam that reachs the cantilever array. In order to be able to move the -cantilever array, it is mounted on a translation and rotational stage with five -degrees of freedom. The optical system is also fixed to the stage. Thus, the -cantilever array is centered in the optical system which can be adjusted -accurately. The beam illuminates the array by a microscope objective and the -light reflects on the cantilevers. Likewise the reference beam reflects on a -movable mirror. A CMOS camera chip records the reference and sample beams which -are recombined in the beam splitter and the interferogram. At the beginning of -each experiment, the movable mirror is fitted manually in order to align the -interferometric fringes approximately parallel to the cantilevers. When -cantilevers move due to the surface, the bending of cantilevers produce -movements in the fringes that can be detected with the CMOS camera. Finally the -fringes need to be analyzed. In~\cite{AFMCSEM11}, the authors used a LabView -program to compute the cantilevers' movements from the fringes. +Linnick interferomter~\cite{Sinclair:05}. It is illustrated in +Figure~\ref{fig:AFM}. A laser diode is first split (by the splitter) into a +reference beam and a sample beam that reachs the cantilever array. In order to +be able to move the cantilever array, it is mounted on a translation and +rotational hexapod stage with five degrees of freedom. The optical system is +also fixed to the stage. Thus, the cantilever array is centered in the optical +system which can be adjusted accurately. The beam illuminates the array by a +microscope objective and the light reflects on the cantilevers. Likewise the +reference beam reflects on a movable mirror. A CMOS camera chip records the +reference and sample beams which are recombined in the beam splitter and the +interferogram. At the beginning of each experiment, the movable mirror is +fitted manually in order to align the interferometric fringes approximately +parallel to the cantilevers. When cantilevers move due to the surface, the +bending of cantilevers produce movements in the fringes that can be detected +with the CMOS camera. Finally the fringes need to be +analyzed. In~\cite{AFMCSEM11}, the authors used a LabView program to compute the +cantilevers' movements from the fringes. \begin{figure} \begin{center} -- 2.39.5