-determine accurately the deflection with optic
-interferometer~\cite{CantiOptic89}, pizeoresistor~\cite{CantiPiezzo01} or
-capacitive sensing~\cite{CantiCapacitive03}. In this paper our attention is
-focused on a method based on interferometry to measure cantilevers'
-displacements. In this method cantilevers are illiminated by an optic
-source. The interferometry produces fringes on each cantilevers which enables to
-compute the cantilever displacement. In order to analyze the fringes a high
-speed camera is used. Images need to be processed quickly and then a estimation
-method is required to determine the displacement of each cantilever.
-In~\cite{AFMCSEM11} {\bf verifier ref}, the authors have used an algorithm based
-on spline to estimate the cantilevers' positions. The overall process gives
+determine accurately the deflection with different mechanisms.
+In~\cite{CantiPiezzo01}, authors used piezoresistor integrated into the
+cantilever. Nevertheless this approach suffers from the complexity of the
+microfabrication process needed to implement the sensor in the cantilever.
+In~\cite{CantiCapacitive03}, authors have presented an cantilever mechanism
+based on capacitive sensing. This kind of technic also involves to instrument
+the cantiliver which result in a complex fabrication process.
+
+In this paper our attention is focused on a method based on interferometry to
+measure cantilevers' displacements. In this method cantilevers are illuminated
+by an optic source. The interferometry produces fringes on each cantilevers
+which enables to compute the cantilever displacement. In order to analyze the
+fringes a high speed camera is used. Images need to be processed quickly and
+then a estimation method is required to determine the displacement of each
+cantilever. In~\cite{AFMCSEM11}, the authors have used an algorithm based on
+spline to estimate the cantilevers' positions.
+%%RAPH : ce qui est génant c'est qu'ils ne parlent pas de spline dans ce papier...
+ The overall process gives