vertical displacement of the cantilever.
The system build by authors of~\cite{AFMCSEM11} has been developped based on a
-Linnick interferomter~\cite{Sinclair:05}. It is illustrated in Figure~\ref{fig:AFM}. A
-laser beam is first split (by the splitter) into a reference beam and a sample
-beam that reachs the cantilever array. In order to be able to move the
-cantilever array, it is mounted on a translation and rotational stage with five
-degrees of freedom. The optical system is also fixed to the stage. Thus, the
-cantilever array is centered in the optical system which can be adjusted
-accurately. The beam illuminates the array by a microscope objective and the
-light reflects on the cantilevers. Likewise the reference beam reflects on a
-movable mirror. A CMOS camera chip records the reference and sample beams which
-are recombined in the beam splitter and the interferogram. At the beginning of
-each experiment, the movable mirror is fitted manually in order to align the
-interferometric fringes approximately parallel to the cantilevers. When
-cantilevers move due to the surface, the bending of cantilevers produce
-movements in the fringes that can be detected with the CMOS camera. Finally the
-fringes need to be analyzed. In~\cite{AFMCSEM11}, the authors used a LabView
-program to compute the cantilevers' movements from the fringes.
+Linnick interferomter~\cite{Sinclair:05}. It is illustrated in
+Figure~\ref{fig:AFM}. A laser diode is first split (by the splitter) into a
+reference beam and a sample beam that reachs the cantilever array. In order to
+be able to move the cantilever array, it is mounted on a translation and
+rotational hexapod stage with five degrees of freedom. The optical system is
+also fixed to the stage. Thus, the cantilever array is centered in the optical
+system which can be adjusted accurately. The beam illuminates the array by a
+microscope objective and the light reflects on the cantilevers. Likewise the
+reference beam reflects on a movable mirror. A CMOS camera chip records the
+reference and sample beams which are recombined in the beam splitter and the
+interferogram. At the beginning of each experiment, the movable mirror is
+fitted manually in order to align the interferometric fringes approximately
+parallel to the cantilevers. When cantilevers move due to the surface, the
+bending of cantilevers produce movements in the fringes that can be detected
+with the CMOS camera. Finally the fringes need to be
+analyzed. In~\cite{AFMCSEM11}, the authors used a LabView program to compute the
+cantilevers' movements from the fringes.
\begin{figure}
\begin{center}
