Cantilevers are used inside atomic force microscope which provides high
resolution images of surfaces. Several technics have been used to measure the
displacement of cantilevers in litterature. For example, it is possible to
-determine accurately the deflection with optic interferometer~\cite{CantiOptic89},
-pizeoresistor~\cite{CantiPiezzo01} or capacitive
-sensing~\cite{CantiCapacitive03}.
-%% blabla +
+determine accurately the deflection with optic
+interferometer~\cite{CantiOptic89}, pizeoresistor~\cite{CantiPiezzo01} or
+capacitive sensing~\cite{CantiCapacitive03}. In this paper our attention is
+focused on a method based on interferometry to measure cantilevers'
+displacements. In this method cantilevers are illiminated by an optic
+source. The interferometry produces fringes on each cantilevers which enables to
+compute the cantilever displacement. In order to analyze the fringes a high
+speed camera is used. Images need to be processed quickly and then a estimation
+method is required to determine the displacement of each cantilever.
+In~\cite{AFMCSEM11} {\bf verifier ref}, the authors have used an algorithm based
+on spline to estimate the cantilevers' positions. The overall process gives
+accurate results but all the computation are performed on a standard computer
+using labview. Consequently, the main drawback of this implementation is that
+the computer is a bootleneck in the overall process. In this paper we propose to
+use a method based on least square and to implement all the computation on a
+FGPA.
+
+The remainder of the paper is organized as follows. Section~\ref{sec:measure}
+describes more precisely the measurement process. Our solution based on the
+least square method and the implementation on FPGA is presented in
+Section~\ref{sec:solus}. Experimentations are described in
+Section~\ref{sec:results}. Finally a conclusion and some perspectives are
+presented.
+
+
+
%% quelques ref commentées sur les calculs basés sur l'interférométrie
\section{Measurement principles}
\subsubsection{Comparison}
-\subsection{VDHL design paradigms}
+\subsection{VHDL design paradigms}
-\subsection{VDHL implementation}
+\subsection{VHDL implementation}
\section{Experimental results}
\label{sec:results}